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Krypton Fluoride Mixtures

Krypton Fluoride Mixtures

Krypton Fluoride Mixtures (Kr & F2) introduction Krypton Fluoride Mixtures are used in 248nm lithography applications, usually in conjunction with an inert gas mixture. For Excimer Laser Mixtures, there are several combinations of gases depending on the intended use. Some are combinations of...

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